| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for growing a single crystal which can increase a rate of crystal growth and can safely manufacture the high-quality single crystal with good productivity. SOLUTION: The apparatus 1 for growing the single crystal has a main chamber 2 which stores at least crucibles 5 and 6 for housing a raw material melt 4 and a heater for heating the raw material melt and a pulling-up chamber 3 which is connected to the upper part of the main chamber 2, and in which the single crystal 15 grown from the raw material melt is pulled up and is housed. The apparatus has cooling cylinders 11 and 12 which are arranged to enclose the single crystal under pulling up and the tips of these cooling cylinders are provided with a sensor 13 which detects the contact with the raw material melt or the approach thereto up to a prescribed distance. COPYRIGHT: (C)2004,JPO
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