发明名称 Method of fabricating a bipolar transistor using selective epitaxially grown SiGe base layer
摘要 Embodiments of a bipolar transistor are disclosed, along with methods for making the transistor. An exemplary transistor includes a collector region in a semiconductor substrate, a base layer overlying the collector region and bound by a field oxide layer, a dielectric isolation layer overlying the base layer, and an emitter structure overlying the dielectric isolation layer and contacting the base layer through a central aperture in the dielectric layer. The transistor may be a heterojunction bipolar transistor with the base layer formed of a selectively grown silicon germanium alloy. A dielectric spacer may be formed adjacent the emitter structure and over a portion of the base layer.
申请公布号 US2004043576(A1) 申请公布日期 2004.03.04
申请号 US20030441763 申请日期 2003.05.19
申请人 MICREL, INCORPORATED 发明人 SHIDELER JAY ALBERT;PRASAD JAYASIMHA SWAMY;SCHLUPP RONALD LLOYD;BECHDOLT ROBERT WILLIAM
分类号 H01L21/331;H01L29/10;H01L29/737;(IPC1-7):H01L21/331 主分类号 H01L21/331
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