发明名称 ALIGNMENT DEVICE AND ALIGNMENT METHOD
摘要 PROBLEM TO BE SOLVED: To provide an alignment device and method whereby a product processing apparatus is accurately installed, product mounting positions for receiving / supplying products can accurately be designated while minimizing the error, and product receiving / supplying positions for receiving / supplying the products from / to a product automatic carrying device can accurately be aligned in a short time. SOLUTION: The product processing apparatus 1 is provided with an alignment device main body 1a placed on a product mount stage 1g of the product processing apparatus 1; a laser emission device 1e provided to the alignment device main body 1a via a plate 1b and emitting a laser beam to indicate a product mounting center 1p of the product processing apparatus or other reference position onto a ceiling; and a strings attached weight 1d instructing the other reference position related to the product mounting center of the product processing apparatus onto a floor face, and the product processing apparatus and the product automatic carrying device are installed on the basis of the emission of the laser beam by the laser emission device 1e and / or the instruction by the weight. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004071948(A) 申请公布日期 2004.03.04
申请号 JP20020231320 申请日期 2002.08.08
申请人 RENESAS TECHNOLOGY CORP 发明人 YANO SHOJI;YAMADA YOSHIAKI;NOMURA YUTAKA
分类号 G03F9/00;H01L21/68;(IPC1-7):H01L21/68 主分类号 G03F9/00
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