| 摘要 |
PROBLEM TO BE SOLVED: To prevent the rolling up of particles due to a pressure difference and the contamination of a workpiece by the particles by eliminating a pressure difference between a high vacuum pump side and a cold trap side. SOLUTION: A vacuum treatment apparatus 1 comprises vacuum chambers such as processing chambers 2a, 2b, 2c, and 2d for housing the workpieces (w) and applying prescribed processes to it, load lock chambers 3a and 3b, and a transportation chamber 5. The transportation chamber is equipped with a first exhaust system 7 having a high vacuum pump 6 via a switching valve 10, and with a second exhaust system 9 having a cold trap 8 via a switching valve 11. In the first exhaust system 7, a ventilation hole 20 is formed between the switching valve 10 and the high vacuum pump 6. In the second exhaust system 9, a ventilation hole 21 is formed between the switching valve 11 and the cold trap 8. The ventilation holes 20 and 21 are connected by a pipe 22. COPYRIGHT: (C)2004,JPO
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