| 摘要 |
PROBLEM TO BE SOLVED: To provide a disk cleaner that presses the polishing pads to a disk and replaces the polishing pads and applies the polishing agent all automatically when cleaning a disk. SOLUTION: This cleaner has a turntable 20 to mount a disk 1 to polish, and polishing pads 5A, 5B rotating to polish the surface 1A of the disk 1. The the rotation axial lines 0a, Ob of the polishing pads 5A, 5B are disposed perpendicular to the surface 1A, and the above turntable 20 can move in the direction of the rotation axial lines Oa, Ob. It is also provided with an automatic polishing pad switch mechanism 40 to automatically move the polishing pads 5A, 5B from the retract position to the polishing position within the plane orthogonal to the above rotating axial lines Oa, Ob, and an automatic pressing mechanism 60 to press the above disk 1 to the polishing pads 5A, 5B brought into the polishing position. COPYRIGHT: (C)2004,JPO
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