METHOD OF CONTROLLING SEPARATION CHARGE OF PLATE-LIKE MEMBER AND SEPARATION CHARGE CONTROL DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent a separation charge upon moving a plate-like member from a placing part. SOLUTION: A plurality of conductive diaphragms 17 are provided in parallel. Each of the diaphragms 17 is formed to be a long rectangular flat plate-like shape narrower than the width of a glass substrate 12. The glass substrate 12 is jointly supportable or levitatingly maintainable by the diaphragms 17. Each of the diaphragms 17 are earthed. Upon moving the glass substrate 12 placed in a temporarily state from the diaphragms 17, the diaphragms 17 are excited to cause ultrasonic waves, and the glass substrate 12 is levitated over the diaphragms 17 with a predetermined space in between using radiation pressure of sound waves. COPYRIGHT: (C)2004,JPO