METHOD AND APPARATUS OF CARBON NANOTUBE FABRICATION

摘要

A carbon nanotube fabricating system and method that employs control automation to ensure safety during the fabrication of nanotubes in a variety of applications. A method of producing carbon nanotubes in a process chamber 18 includes executing a nanotube growth recipe and purging oxygen from the process chamber in response to the executing step. The purge step is performed by flowing an inert gas through the process chamber at appropriate times and for predetermined durations during the fabrication process.