发明名称 |
LARGE SUBSTRATE TEST SYSTEM |
摘要 |
A system and method for testing substrates is generally provided. In one embodiment, a test system for testing a substrate includes a load lock chamber, a transfer chamber and a test station. The load lock chamber and the test station are disposed on top of one another and coupled to the transfer chamber. The transfer chamber includes a robot adapted to transfer a substrate between the load lock chamber, which is at a first elevation, and the test station, which is at a second elevation. In another embodiment, a test station is provided having a turntable adapted to rotate the substrate. The turntable enables the range of motion required to test the substrate to be substantially reduced while facilitating full test and/or inspection of the substrate. |
申请公布号 |
WO03100837(A3) |
申请公布日期 |
2004.03.04 |
申请号 |
WO2003US15903 |
申请日期 |
2003.05.21 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BRUNNER, MATTHIAS;KURITA, SHINICHI;BLONIGAN, WENDELL, T.;KEHRBERG, EDGAR |
分类号 |
G02F1/13;G01R31/01;H01L21/00;H01L21/02;H01L21/677;H01L21/68 |
主分类号 |
G02F1/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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