| 发明名称 |
SYSTEM AND METHOD FOR FAST FOCAL LENGTH ALTERATIONS |
| 摘要 |
An apparatus and method for fast changing a focal length of a charged particle beam the method comprising the step of changing a control signal in response to a relationship between the control signal voltage value and the focal length of the charged particle beam. |
| 申请公布号 |
WO03032022(A3) |
申请公布日期 |
2004.03.04 |
| 申请号 |
WO2002US32424 |
申请日期 |
2002.10.09 |
| 申请人 |
APPLIED MATERIALS ISRAEL LTD.;APPLIED MATERIALS INC.;SHEMESH, DROR;SHACHAL, DUBI |
发明人 |
SHEMESH, DROR;SHACHAL, DUBI |
| 分类号 |
G06T17/00;G06T17/20;H01J3/14;H01J3/26;H01J37/153;H01J37/21;H01J37/22;H01J37/26 |
主分类号 |
G06T17/00 |
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