发明名称 |
Binary blazed diffracting optical element and objective containing this has diffracting structures of varied and controlled distances with respect to the radiation wavelength |
摘要 |
A binary blazed diffracting optical element (1) comprises only one row of individual sub-structures (2) having a closed geometric surface in plan whose measurement parallel to the extending direction varies and whose measurement perpendicular to this has a maximum greater than the radiation wavelength. An Independent claim is also included for a microlithographic projection objective comprising the above. |
申请公布号 |
DE10313548(A1) |
申请公布日期 |
2004.03.04 |
申请号 |
DE2003113548 |
申请日期 |
2003.03.26 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
ARNOLD, RALF;KLEEMANN, BERND |
分类号 |
G02B5/18;G02B27/00;G02B27/44;G03F7/20;(IPC1-7):G02B5/18 |
主分类号 |
G02B5/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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