首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
APPARATUS FOR IMPROVING PLASMA DISTRIBUTION AND PERFORMANCE IN AN INDUCTIVELY COUPLED PLASMA
摘要
申请公布号
EP1166324(B1)
申请公布日期
2004.03.03
申请号
EP20000918371
申请日期
2000.03.23
申请人
TOKYO ELECTRON LIMITED
发明人
BRCKA, JOZEF
分类号
H05H1/46;B01J19/08;C23C14/34;C23C16/507;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32
主分类号
H05H1/46
代理机构
代理人
主权项
地址
您可能感兴趣的专利
FOERSPAEND HANE ELLER AVFYRINGSANORDNING FOER KARBIN.
KOPPLINGSEFFEKTKAELLA.
PROCESS FOR PREPARING NICKEL REFRACTORY ALLOYS
ARTIFICIAL BREATHING APPARATUS
MULTISTEP VORTEX REACTOR FOR GAS-SOLID REACTIONS
NOVEL PROCESS FOR/PREPARATION OF BENZOPYRANO (2,3-D)TRIAZOLE DERIVATIVES USEFUL FOR THERAPEUTICAL PURPOSES AS WELL AS FOR THE PREPARATION OF INTERMEDIATES COMPOUNDS THEREOF
TOOTHPASTE COMPOSITION
PROCESS FOR OBTAINING ELECTROINSULATING VARNISHES FOR COVERING FIRST-CLASS CONDUCTORS
MECHANICAL BALANCER
MOULDING-CASTING INSTALLATION IN MAGNETIC FIELD
HEAT ACCUMULATOR
DRILLING DEVICE
PNEUMATIC APPARATUS FOR PROGRAMMING THE PASSING OF A FLUID THROUGH A VALVE
COMPUTATION AND INTEGRATION UNIT FOR HEAT ENERGY METER
MACHINE FOR ARRANGING PIPES IN DOFFING BOXES
MACHINE FOR WINDING PARATAPE ON LARGE SECTION RODS OF ELECTRICAL MACHINES
PROTECTION DEVICE WITH DELAYED ACTION
NJECTABLE SOLUTION FOR TREATING ARTERIAL AND ARTERIOVENOUS CIRCULATION DEFICIENCIES
DEVICE FOR PROFILING GRINDING WHEELS FOR RECTIFYING CYCLOID TOOTHED GEARS
PROCESS AND INSTALLATION FOR OBTAINING DESALTED WATER