METHOD AND DEVICE FOR DOPING, DIFFUSION AND OXIDATION OF SILICON WAFERS UNDER REDUCED PRESSURE,申请号EP20020730404-传众专利搜索

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发明名称	METHOD AND DEVICE FOR DOPING, DIFFUSION AND OXIDATION OF SILICON WAFERS UNDER REDUCED PRESSURE
摘要
申请公布号	EP1393351(A1)	申请公布日期	2004.03.03
申请号	EP20020730404	申请日期	2002.05.14
申请人	SEMCO ENGINEERING S.A.	发明人	PELLEGRIN, YVON
分类号	H01L21/22;C30B31/00;C30B33/00;H01L21/00;H01L21/31;(IPC1-7):H01L21/00;C30B35/00	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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