发明名称 |
CLUSTER TOOL AND METHOD FOR CONTROLLING TRANSPORT |
摘要 |
At a time Tp when a wafer W is transferred into either a load lock chamber LL1 or LL2, periods PSL for the load lock chambers LL1 and LL2 to get ready to permit a transfer of a next wafer W thereinto are calculated based on a timing for exchange of wafers W between the load lock chamber LL1 or LL2 and a loader module LM. When the periods PSL are calculated, a loader arm LA1 or LA2 selects a next wafer W having the shortest period to get ready to be transferable into the load lock chamber LL1 or LL2, from load ports LP1 to LP3. This improves transfer delay in a cluster tool provided with the load lock chambers. <IMAGE>
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申请公布号 |
EP1394849(A1) |
申请公布日期 |
2004.03.03 |
申请号 |
EP20020707288 |
申请日期 |
2002.04.02 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
IIJIMA, KIYOHITO;KAISE, SEIICHI;TAKAHASHI, KEIKO;OBI, AKIRA |
分类号 |
H01L21/00;H01L21/677;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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