发明名称 Apparatus and method for gettering contaminants in a hermetic enclosure
摘要 <p>A method of contaminant gettering. Specifically, one embodiment of the present invention discloses an apparatus for gettering a contaminant (e.g., 430) comprising an exothermically reactive structure (220) disposed within a hermetic enclosure (110). A sorbent material (210) coats a surface (230) of the exothermically reactive structure (220). The sorbent material (210) reacts with a contaminant (e.g., 430) contained within an atmosphere of the hermetic enclosure (110) when exposed to heat from an exothermic alloying reaction in the exothermically reactive structure (220). As such, the contaminant (e.g., 430) becomes gettered within the hermetic enclosure (110). <IMAGE></p>
申请公布号 EP1394854(A1) 申请公布日期 2004.03.03
申请号 EP20030010840 申请日期 2003.05.14
申请人 AGILENT TECHNOLOGIES INC 发明人 SIMON, JONATHAN
分类号 B01J20/02;H01J7/18;H01L23/26;(IPC1-7):H01L23/26;H01J29/94 主分类号 B01J20/02
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