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发明名称
METHOD AND APPARATUS FOR CONTACTLESS CAPACITIVE TESTING OF INTEGRATED CIRCUITS
摘要
申请公布号
EP1393090(A2)
申请公布日期
2004.03.03
申请号
EP20020706161
申请日期
2002.02.05
申请人
SUN MICROSYSTEMS, INC.
发明人
COATES, WILLIAM;BOSNYAK, ROBERT;SUTHERLAND, IVAN
分类号
G01R31/303;(IPC1-7):G01R31/312
主分类号
G01R31/303
代理机构
代理人
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地址
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