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发明名称
RECESSED SPUTTER TARGET
摘要
申请公布号
EP1392884(A1)
申请公布日期
2004.03.03
申请号
EP20020776556
申请日期
2002.05.08
申请人
PRAXAIR S.T. TECHNOLOGY, INC.
发明人
HUNT, THOMAS, J.;KOENIGSMANN, HOLGER, J.;GILMAN, PAUL, S.
分类号
B23K20/00;B23K20/02;C23C14/34;(IPC1-7):C23C14/34;B23K28/00;B23K33/00
主分类号
B23K20/00
代理机构
代理人
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