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发明名称
THIN FILM DEPOSITION APPARATUS
摘要
申请公布号
AU2003251052(A1)
申请公布日期
2004.03.03
申请号
AU20030251052
申请日期
2003.08.13
申请人
OXFORD INSTRUMENTS PLASMA TECHNOLOGY LIMITED
发明人
MICHAEL WATSON;ROBERT KNIGHT;BRIAN HALSALL;TIMOTHY JOLLY;CHRISTOPHER GEORGE
分类号
C23C14/54
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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