发明名称 Method of connecting a conductive trace to a semiconductor chip using plasma undercut etching
摘要 A method of connecting a conductive trace to a semiconductor chip includes providing a semiconductor chip with upper and lower surfaces, wherein the upper surface includes a conductive pad, providing a conductive trace, then disposing an insulative adhesive between the conductive trace and the chip, thereby mechanically attaching the conductive trace to the chip such that the conductive trace overlaps the pad, the adhesive contacts and is sandwiched between the conductive trace and the pad, and the conductive trace and the pad are electrically isolated from one another, then removing the adhesive between the conductive trace and the pad, and then forming a connection joint that contacts and electrically connects the conductive trace and the pad. Preferably, the adhesive is removed by laser ablation then plasma etching.
申请公布号 US6699780(B1) 申请公布日期 2004.03.02
申请号 US20020302642 申请日期 2002.11.23
申请人 BRIDGE SEMICONDUCTOR CORPORATION 发明人 CHIANG CHENG-LIEN;LIN CHARLES W. C.
分类号 H01L21/60;H05K3/40;(IPC1-7):H01L21/44 主分类号 H01L21/60
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