发明名称 |
Method for controlling a processing apparatus |
摘要 |
In a method for controlling a processing apparatus, an error value between an input value of the processing apparatus for processing a subject to be processed, and a measurement value obtained by measuring the subject being processed is obtained. A correction value is computed for correcting the input value of the processing apparatus in the direction of decreasing the error value, and the values are managed as processing data to be utilized in computing a next correction value. Previous processing data having a history identical to that of the subject loaded to the processing apparatus is searched, and a current bias correction value is predicted from a plurality of most recent correction values having the identical history. Also, a current random correction value is predicted by means of a neural network on the basis of a plurality of most recent random correction values. The predicted bias correction value is summed with the random correction value as a current correction value of the processing apparatus.
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申请公布号 |
US6700648(B2) |
申请公布日期 |
2004.03.02 |
申请号 |
US20020072901 |
申请日期 |
2002.02.12 |
申请人 |
SAMSUNG ELECTRONICS, CO., LTD. |
发明人 |
JUN KYOUNG SHIK;PARK CHAN HOON;PARK YIL SEUG;CHO BONG SU;KANG HYUN TAI;HWANG JAE WON;JEI YOUNG HO |
分类号 |
G03F7/22;G05B13/02;G06F17/10;G06N3/00;H01L21/027;(IPC1-7):G03B27/32;G03B27/42;G06F19/00;G06K9/62 |
主分类号 |
G03F7/22 |
代理机构 |
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代理人 |
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地址 |
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