| 摘要 |
PURPOSE: A condenser microphone diaphragm is provided which has good mechanical, physical and chemical characteristics by forming a conductive metallic thin film on a polymer film using a DC magnetic sputter machine, and thus reduces fabrication cost. CONSTITUTION: The condenser microphone diaphragm includes a polyphenylene sulfide(PPS) film(110), and a thin film layer(120) formed by coating one of pure gold(Au,99.99%) and a 18K gold alloy(Au 75%,Ag 12.5%,Cu 12.5%) and a 14K gold alloy(Au 60%,Ag 20%, Cu 20%) and a pure silver(Ag 99.99%) and a pure copper(Cu 99.99%) and an ITO(Indium Tin Oxide,In203-Sn02) by a sputtering process.
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