Fabrication method of blue light emitting ZnO thin film phosphor

摘要

Substrate that is vapor-deposited with dopant-added ZnO thin film is loaded into a heat-treating chamber, and heat-treated quickly under gas atmosphere to activate the dopant. A thin film phosphor having new luminescence peak can be fabricated by quick-heat-treatment of zinc compound semiconductor under hydrogen atmosphere. This thin film phosphor can replace the conventional blue luminescence using alloy-type ZnO and furthermore can be utilized as blue light emitting material for flat plate display elements such as FED and PDP.