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发明名称
摘要
申请公布号
JP3501930(B2)
申请公布日期
2004.03.02
申请号
JP19970329923
申请日期
1997.12.01
申请人
发明人
分类号
C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):C23F4/00
主分类号
C23F4/00
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