发明名称 |
Cylinder cabinet and method of purging remaining gas in the pipe thereof |
摘要 |
A cylinder containing gas has a valve and is connected to a delivery side through a filling pipe, a primary pipe, a first air-operated valve, a pressure reducing valve, a secondary pipe, and a second air-operated valve. Inert gas flows into the primary pipe through an air-operated valve. The primary pipe is connected to a vacuum generator through an air-operated valve and a pipe. Gas remaining in the primary pipe is purged as exhaust gas by automatically repeating leaving-pipe-in-pressurized-state purge for pressurizing the inside of the primary pipe by the inert gas and leaving the pipe in this state for 2 to 10 minutes and evacuating the pipe for 20 seconds. Gas remaining in the primary pipe is purged with high-efficiency, and the vacuum generator is stopped while the inside of the primary pipe is pressurized in the leaving-pipe-in-pressurized-state purge and the just-before-replacement purge.
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申请公布号 |
US6698469(B2) |
申请公布日期 |
2004.03.02 |
申请号 |
US20020180497 |
申请日期 |
2002.06.27 |
申请人 |
NEC ELECTRONICS CORPORATION;TOYOKU KAGAKU CO., LTD. |
发明人 |
SAKAMOTO YUTAKA;KANO TSUNEO;OGAWA TAKASHI;MATSUMURA HIROSHI;SANGO TOSHIAKI;ITOH KIYOTO;OTAKE NORIO |
分类号 |
F17C7/00;F17C13/04;F17D1/02;H01L21/02;(IPC1-7):F17C13/00 |
主分类号 |
F17C7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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