发明名称 METHOD OF INTERFERENCE MEASUREMENT OF FORM OF SURFACE OF OPTICAL PARTS
摘要 FIELD: measurement technology. SUBSTANCE: method of interference measurement of form of surface of optical parts includes recording of interference picture by photography on transparent carrier, illumination of recorded interferogram in angle interval from beta to alpha+beta, where alpha is angle of light diffusion by interferogram; beta- is front aperture angle of analyzing optical system, and subsequent analysis of light image. Interferogram is also illuminated by second light source in angle interval from 0 to beta, Inteferogram is illuminated by first and second light sources in antiphase. EFFECT: expanded functional potential of method of observation of interference fringes in light diffusion. 1 dwg
申请公布号 RU2224982(C2) 申请公布日期 2004.02.27
申请号 RU19990123152 申请日期 1999.11.01
申请人 发明人 NOSKOV M.F.
分类号 G01B11/24 主分类号 G01B11/24
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