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发明名称
CLEANING METHOD AND APPARATUS
摘要
申请公布号
SG102055(A1)
申请公布日期
2004.02.27
申请号
SG20020003708
申请日期
2002.06.19
申请人
YOKOGAWA ELECTRIC CORPORATION;FUJI ELECTRIC CO., LTD.
发明人
TAKASHI YOSHIDA;MOTOAKI IWASAKI;TATSURO YANO;KURAO HABAYA;TAKAHIRO SHIROMA
分类号
G02F1/13;B08B3/02;B08B5/02;B08B7/00;B24C1/00;G11B23/50;H01L21/00;H01L21/304;H05F3/06;(IPC1-7):B08B3/02
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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