发明名称 |
Способ получени многослойных магнитных пленок |
摘要 |
FIELD: processes and equipment for deposition of thin films, possibly used at making magnetic pickups. ^ SUBSTANCE: method comprises steps of layer-by- layer deposition of magnetic and dielectric materials in vacuum while applying outer magnetic field to deposition plane and heating substrate; further annealing of the whole structure; depositing layers of alloy Fe - Ni at rate no less than 30 /s and layers of silica - at rate no less than 250 /s in condition of technical vacuum onto substrate heated up to 280 -300 C; annealing prepared structure for 30 min at the same temperature. ^ EFFECT: enhanced operational characteristics of magnetic field pickup, possibility for making magnetic layers with equal and small coercivity, improved efficiency of method due to reduced operation cycle. ^ 2 tbl, 1 ex |
申请公布号 |
RU2002121556(A) |
申请公布日期 |
2004.02.27 |
申请号 |
RU20020121556 |
申请日期 |
2002.08.05 |
申请人 |
Федеральное государственное унитарное предпри тие Научно-исследовательский институт измерительных систем им. Ю.Е. Седакова |
发明人 |
Гусев Валентин Константинович;Тулина Лиди Ивановна;Уткин Владимир Павлович |
分类号 |
C23C14/06;C23C14/35;C23C14/58 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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