CONTACT LINES OF LIQUID CRYSTAL DISPLAY AND METHOD FOR FORMING THE SAME

摘要

PURPOSE: Contact lines of a liquid crystal display and a method for forming the same are provided to effectively reduce resistance of contact lines by forming a silicide film between metal pads and pad terminals. CONSTITUTION: A metal layer is deposited on a transparent substrate(70). A silicide film(72) is formed on the metal layer through a plasma process. The metal layer and the silicide film are sequentially etched to form metal pads(71a). An inorganic insulating film(73) is formed on a front surface of the substrate. An organic insulating film(74) is applied on the inorganic insulating film. The organic insulating film and the inorganic insulating film are sequentially etched to form contact holes. A transparent conducting oxide film is deposited and is selectively patterned to form pad terminals(76) on the contact holes and the organic insulating film. The pad terminals contact with the metal pads through the silicide film.