| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method which is capable of making amorphous silicon, silicon formed of fine crystals or polysilicon grow into a single crystal or silicon formed of crystals larger than usual through a laser annealing process. SOLUTION: When an amorphous silicon island to serve as an active region is melted and recrystallized as irradiated with a laser beam, the amorphous silicon island is accompanied with a peninsula composed of very fine lines which are quickly cooled down, so that nucleuses occur in the peninsula, and the silicon island to serve as the active region is turned into a single crystal. COPYRIGHT: (C)2004,JPO
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