| 摘要 |
PROBLEM TO BE SOLVED: To perform wavefront aberration correction in a wavefront aberration correction apparatus even if the apparatus is disposed in a small space. SOLUTION: A wavefront aberration correction apparatus, which corrects wavefront aberration by changing a surface profile of a mirror, has a plurality of correction units for changing the surface profile of the mirror, and the correction unit has an actuator disposed on a side face of the mirror, a force applying member connected to a back of the mirror, and a force transmission mechanism for connecting the actuator with the force action member. COPYRIGHT: (C)2004,JPO |
