| 摘要 |
PROBLEM TO BE SOLVED: To provide a pump having improved driving efficiency by reducing the number of mechanical on-off valves to reduce pressure loss for more reliability, accommodating high load pressure and high frequency drive and increasing the discharge volume of fluid per pumping cycle. SOLUTION: A circular diaphragm 5 arranged at the bottom of a case 7 is fixed and supported at its outer periphery edge onto the case. The bottom of the diaphragm is provided with a piezoelectric element 6 for operating the diaphragm. A pump chamber 3 is located in a space between the diaphragm and the upper wall of the case, and an inlet flow path 1 having a check valve 4 as a fluid resistant element and an outlet flow path 2 communicating with the pump chamber during operating the pump are open to the pump chamber. In the pump, the piezoelectric element is controlled to be driven so that an average displacement speed in the stroke of reducing the capacity of the pump chamber in the diaphragm is fast enough to arrive at an arrival displacement position in a period 1/2 or slower and 1/10 or faster of a fluid inherent oscillation cycle T of the pump chamber and the outlet flow path. COPYRIGHT: (C)2004,JPO
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