| 摘要 |
PROBLEM TO BE SOLVED: To provide a sucking and carrying device usable in carrying various parts such as substrates for semiconductor devices by sucking without damaging the substrates being carried, with high carrying reliability, with less restricting conditions are set depending on articles to be carried, and which is maintenance-free and low-cost. SOLUTION: Suction pads 3 having flexibility are provided on a suction panel 1, and chambers 6 are formed between the suction pads and the suction panel 3. The chambers 6 are communicated with an air passage 4. COPYRIGHT: (C)2004,JPO
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