发明名称 Method of manufacturing semiconductor device
摘要 A method of manufacturing a semiconductor device according to a first aspect of the present invention includes: forming a first photosensitive resin cured layer including a first opening above a semiconductor substrate, on which a underlying wiring layer is formed, the first opening being made above the underlying wiring layer; forming a second photosensitive resin cured layer including a second opening on the first photosensitive resin cured layer, a bottom of the second opening including an opening top of the first opening; and forming a wiring layer so as to fill in the first and second openings.
申请公布号 US2004038520(A1) 申请公布日期 2004.02.26
申请号 US20030394154 申请日期 2003.03.24
申请人 SETO MASAHARU;MATSUO MIE 发明人 SETO MASAHARU;MATSUO MIE
分类号 H01L21/768;(IPC1-7):H01L21/476 主分类号 H01L21/768
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