| 摘要 |
PROBLEM TO BE SOLVED: To suppress generation of a foreign matter such as particles or the like from a work holding device. SOLUTION: The work holding device moves a base plate 3 by a pneumatic piston 2 provided in a body frame 1, grasps a work W between the base 3 and the frame 1, and holds the work W. The base 3 is supported to the frame 1 by an elastically deformable deformation member 13. The member 13 is disposed in parallel along a moving direction of the base 3, and includes one set of two leaf springs 13a, 13b disposed obliquely to the moving direction. A parallelogram is constituted of the two springs 13a, 13b, the frame 1 and the base 3. When the base is moved, the two springs 13a, 13b are deformed in parallel to hold the parallelogram relation, and the base 3 is hence moved in both horizontal and vertical directions. COPYRIGHT: (C)2004,JPO |
