| 摘要 |
PROBLEM TO BE SOLVED: To provide a hollow fine structure having a three-dimensional form of multiple or integrated spherical surfaces or curved surfaces, polyhedron or the like in use of thin film material softened by heating such as thin film metallic glass. SOLUTION: Thin film softened by heating is formed on a base plate. A fine flat surface structure having an occlusion part occluding gas or gas generator by the thin film is formed. The fine flat surface structure is heated to softening point of the thin film or higher, and the thin film is deformed by pressure of the gas occluded in the occlusion part or pressure of gas generated by the gas generator and the occlusion part is expanded to form a solidified three-dimensional form fine hollow structure. The three-dimensional form fine hollow structure is manufactured by cooling and fixing the solidified shape. In a process forming the three-dimensional form fine hollow structure, solidification of the thin film is controlled by using a mold die. COPYRIGHT: (C)2004,JPO
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