| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an active matrix organic EL display device capable of preventing the reduction in display quality by the delay of signal by the capacity between wiring and a cathode or the malfunction of a polysilicon TFT, and a method of manufacturing it. <P>SOLUTION: This device comprises organic EL light emitting elements aligned on a glass substrate in a matrix shape, a pixel circuit 3 including the polysilicon TFT for controlling the respective organic EL light emitting elements, and a row driver and column driver for controlling the pixel circuit. The cathode is formed in an area except the polysilicon TFT by use of an evaporation mask formed of a metal plate having an opening and an electron beam evaporation source so as to surround the light emitting area 5 of two or more pixels continued in the row-side wiring direction. Further, the capacity between the wiring for connecting the row driver or column driver to the pixel circuit and the cathode 7 is reduced, and the fluctuation of gate voltage of the TFT by the X-ray from the electron beam evaporation source is prevented. <P>COPYRIGHT: (C)2004,JPO |
