| 摘要 |
PROBLEM TO BE SOLVED: To facilitate vibration of a sensor tube for improving measurement precision. SOLUTION: A mass flow meter 10 is provided with a sensor tube 14 inserted into a sealed storage case 12, a vibrator 15 vibrating the sensor tube 14, and a pickup 16 detecting displacement of the vibrating sensor tube 14. In the sensor tube 14, one end 14a is held by a lid 18 on the inflow side, while the other end 14b is extended to an inner space 24 of the storage case 12. The sensor tube 14 is flexibly constructed as the other end 14b is a free end, and a deformation quantity (amplitude) to vibration force of the vibrator 15 can be increased. Therefore, the sensor tube 14 is easily vibrated in the mass flow meter 10, and measurement precision in a micro flow rate area with comparatively low Coriolis force is improved. Consequently, fluid to be measured is measured accurately. COPYRIGHT: (C)2004,JPO
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