| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm and a diaphragm valve capable of realizing high seal reliability, requiring low pressure for sealing of a valve seat portion, low output of a valve drive, and little danger of leak due to biting of particles into the valve seat portion, and to provide a film forming device forming significantly high quality. SOLUTION: A film layer 12 of superelastic metal material is formed on a surface coming into contact with the valve seat. Preferably, the Young's modulus of the superelastic material is less than 3,000 kg/mm<SP>2</SP>, the film layer is preferably formed by a IBAD method, and the superelastic material is preferably of a Ti-group alloy. COPYRIGHT: (C)2004,JPO
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