| 摘要 |
PROBLEM TO BE SOLVED: To provide a plate-like member transport device that can save energy as compared with a transport device that holds and transports a plate-like member in the non-contact state by injecting compressed gas to the plate-like member to be transported, and prevents gas containing dusts from being sprayed on the plate-like member. SOLUTION: The plate-like member transport device 10 includes, on a bogie 11, supports 13 for movably supporting the lower end of the plate-like member 12, and an object levitation device 15 capable of holding the plate-like member 12 being inclined in the non-contact state by applying irradiation pressure of sonic wave of a vibrating plate 14 to the plate-like member 12 supported by the supports 13. The supports 13 are respectively fixed to rotary shafts rotated by a pulley and a belt so that the supports 13 can rotates integrally. COPYRIGHT: (C)2004,JPO
|
