| 摘要 |
PROBLEM TO BE SOLVED: To secure relatively large stroke by preventing the change of distance between a moving part and a fixed part due to deformation of a beam member. SOLUTION: A device for displacement fine adjustment is provided with a pair of elastic members 1 oppositely arranged, the fixed part 3 to which each one end of a pair of the elastic members 1 are connected, the moving part 5 which each another end of the pair of the elastic members 1 are connected to and is connected to the fixed part 3 via a beam member 7 and minutely displaces via the beam member 7 due to elastic deformation of the pair of the elastic members 1, and a drive means 9 elastically deforming the pair of the elastic members 1 and minutely displace the moving part 5. The moving part 5 is always pressed against the fixed part 3 in a direction perpendicular to a moving direction. COPYRIGHT: (C)2004,JPO
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