| 摘要 |
PROBLEM TO BE SOLVED: To enable an improvement in fineness of a surface for finish machining and high precision positioning by controlling microvibration effectively. SOLUTION: The guide device is provided with a direct-acting roller bearing for transporting a moving object 4 over a base 1. The influence of a deformation of the moving object is excluded by supporting the moving object 4 with three sliders 3 positioned at each vertex of a triangle, and the passing vibration of a rotating object caused by each slider 3 is controlled by the original normalization effect. COPYRIGHT: (C)2004,JPO
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