| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent foreign matters from depositing on the base plate of a rotary coating apparatus provided with a first vessel rotating while supporting the substrate on which liquid is dropped and with a second vessel surrounding the first vessel in order to prevent the liquid scattered by rotation of the substrate from jumping out to the outside. <P>SOLUTION: The rotary coating apparatus 10 is constituted so that, after forming an extremely thin film by applying the liquid on the substrate 11, gas inside an inner cup 12 is discharged through a gap δ provided in the inner cup 12 to an outer cup 13, a through port 15 is closed by driving an air pressure regulating open mechanism 16 provided at an upper outer cup 13a, gas inside the inner cup 12 and the outer cup 13 is discharged out of an exhaust port 14 provided in an lower outer cup 13b and the inside of the inner cup 12 and the outer cup 13 is dried by pressure reduction, and thereby, solvents in the liquid are evaporated to harden the liquid applied on the substrates 11. <P>COPYRIGHT: (C)2004,JPO |
