发明名称 CMOS TYPE SOLID-STATE IMAGE PICKUP ELEMENT AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a CMOS type solid-state image pickup element capable of accelerating the transfer speed of electric charges stored in a photoelectric conversion element, and easily forming the capacitor of a peripheral circuit part provided on the outer periphery of a light receiving part, and to provide its manufacturing method. SOLUTION: A transfer gate electrode connected to the respective photoelectric conversion elements of the light receiving part is turned to the 2-layer structure of a first transfer gate electrode and a second transfer gate electrode, and the second transfer gate electrode is constituted of a laminated part stacked with the first transfer gate electrode and a non-laminated part not stacked with the first transfer gate electrode. A first capacitor electrode of the capacitor formed at the peripheral circuit is formed together with the formation of the first transfer gate electrode, and a second capacitor electrode of the capacitor is formed together with the formation of the second transfer gate electrode. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004063627(A) 申请公布日期 2004.02.26
申请号 JP20020217901 申请日期 2002.07.26
申请人 SONY CORP 发明人 WATANABE SHINYA;MARUYAMA YASUSHI
分类号 H01L27/146;H01L21/822;H01L27/04;H04N5/335;H04N5/369;H04N5/374;(IPC1-7):H01L27/146 主分类号 H01L27/146
代理机构 代理人
主权项
地址