Handler for holding and transport of wafer between input and output units and process stations in vacuum processing installation in semiconductor manufacture., consisting of elongated flat main body of carbon fibre compound material

摘要

Handler for holding and transport of waters between input and output units and processing stations, e.g. in vacuum processing installation consists of elongated, flat main body (2) of carbon fibre compound material, in which the fibres are cruciformly woven. The body has sequential material recesses forming straps. The body has extra indentations, consisting of material recesses (3) so formed as to form at least one oblique material strap (7). Preferably. there are two such straps of opposite direction and angle of 35-55 degrees to longitudinal axis (8) of body.