METHOD AND DEVICE FOR MOUNTING ELECTRONIC PART, POSITION DETECTING METHOD, AND POSITIONING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an aligning method through which an electronic part can be accurately mounted at a right position on a board in a reduced pressure environment.

SOLUTION: A camera unit 151 which is capable of imaging an upper object and a lower object at the same time through two apertures 152a and 152b is provided inside a chamber 11, and an upper pattern plate 32a and a lower pattern plate 32b are imaged twice by the camera unit 151 for obtaining the paired first picture images and the paired second picture images respectively before and after the chamber 11 is reduced in pressure. The amounts of pattern deviations of the paired first picture images from the paired second picture images are obtained, respectively. The camera unit 151 is moved by a camera moving mechanism 153 so as to be located between the electronic part and the board for imaging the electronic part located above and the board located below at the same time. At this point, the positions of the electronic part and a mounting region on the board are accurately specified by the use of the obtained amounts of two deviations, and the electronic part and the board are accurately aligned with each other.

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