| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck in which an electrostatic field is not concentrated at corners of electrodes even if a voltage of 1-10 kV is applied to the electrostatic electrodes and cracks are not caused on the dielectric films etc. by the applied voltage. SOLUTION: In the electrostatic chuck, the electrostatic electrodes are formed on a ceramic substrate, and ceramic dielectric films are located on the electrostatic electrodes. The electrostatic electrode consists of a pair of facing electrodes, and the profile of the corners of the facing electrodes are formed with curves. COPYRIGHT: (C)2004,JPO |
