| 摘要 |
PROBLEM TO BE SOLVED: To provide a control device with a high-speed response, a wide dynamic range, high precision and low cost which is optimal for an ultraprecision electromagnetic force control apparatus, an ultraprecision current source, a controller for ultraprecision positioning of a probe and the like. SOLUTION: An A/D hybrid control device to calculate an operating variable for an object of control from a signal for an instruction; a controlled variable and a detector is constituted with a deviation arithmetic part I comprising an analog circuit; an arithmetic processing part comprising an analog arithmetic processing part II and a digital arithmetic part III, to both of which output from the deviation arithmetic part I is inputted respectively; and an operating variable summing amplifier IV to sum the output from the two arithmetic processing parts. In this device, simplified PID arithmetic is performed on the output from the part I with the analog circuit in the analog arithmetic processing part II; A/D conversion is performed on the output from the deviation arithmetic part in the digital arithmetic processing part III; advanced control arithmetic including non-linear arithmetic is performed by an MPU; after its result is A/D converted, the result is added to the output from the part II in the operating variable summing amplifier part IV; and the operating variable is outputted. COPYRIGHT: (C)2004,JPO
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