发明名称 VERFAHREN ZUR HERSTELLUNG VON HALBLEITERSCHEIBEN GROSSER ABMESSUNGEN
摘要 PCT No. PCT/FR97/01526 Sec. 371 Date Feb. 17, 1999 Sec. 102(e) Date Feb. 17, 1999 PCT Filed Aug. 26, 1997 PCT Pub. No. WO98/08664 PCT Pub. Date Mar. 5, 1998A process for obtaining at least one wafer of semiconducting material, including the step of cutting an ingot of semiconducting material along a longitudinal plane of the ingot to obtain a wafer with large dimensions. The wafer obtained may be used to make a Semiconductor on Insulator type substrate, for example a Silicon On Insulator substrate.
申请公布号 DE69727303(D1) 申请公布日期 2004.02.26
申请号 DE1997627303 申请日期 1997.08.26
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE, PARIS 发明人 BRUEL, MICHEL
分类号 B28D5/02;B28D5/00;C30B33/00;H01L21/77;H01L21/78;H01L21/84 主分类号 B28D5/02
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