METHOD AND APPARATUS FOR DEPOSITING SUPERCONDUCTING FILM BY IRRADIATING SUBSTRATE SURFACE WITH GAS FED THERETO WITH FIB

摘要

PROBLEM TO BE SOLVED: To deposit a super-conductive film (a super-conductor) for obtaining super-conductive characteristic in a relatively easy manner by using a focused ion beam (FIB) apparatus.

SOLUTION: Gas raw material containing tungsten (W) and gas raw material containing carbon (C) are filled into a gas feed mechanism (W1 and C1). The distance between a tip of each gas gun and (an upper surface) of a substrate is adjusted (W2 and C2). Gaseous tungsten (W) and gaseous carbon (C) are fed to the substrate surface from each tip of the gas guns (W3 and C3). A superconducting film having superconducting characteristic is deposited by scanning ion beams and irradiating the substrate surface with the ion beams while simultaneously feeding these two gases onto the substrate surface.

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