| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a passivation structure configured as a cyclic structure composed of a carbon thin film layer similar to a diamond. <P>SOLUTION: The passivation structure for sealing electric elements arranged on a substrate comprises a carbon thin film layer similar to a first diamond covering a surface and a side face of the electric elements and covering a surface of the substrate, a buffer layer on the carbon thin film similar to the first diamond, and a carbon thin film layer similar to a second diamond carbon film layer on the buffer layer. A part of the carbon thin film layer similar to the second diamond forms a cyclic structure by directly covering the carbon thin film layer similar to the first diamond. <P>COPYRIGHT: (C)2004,JPO |
