An optical sensor, in particular for a scanning force microscope, measures the deflection of a cantilever (3) using an optical resonator between the cantilever (3) and an output surface (12b) of a lens assembly (10). In order to form the resonator, output surface (12b) is concave and parallel to the wavefronts of the light within the resonator. This design provides a resonator of high stability and allows to keep the distance between lens assembly (10) and cantilever (3) comparatively large.
申请公布号
WO2004017329(A1)
申请公布日期
2004.02.26
申请号
WO2002IB03253
申请日期
2002.08.14
申请人
UNIVERSITAET BASEL;FREDERIX, PATRICK, LOUIS, THEODORUS, MARTIN;HUG, HANS, JOSEF
发明人
FREDERIX, PATRICK, LOUIS, THEODORUS, MARTIN;HUG, HANS, JOSEF